Trichlorosilane (SiHCl3)	Cl3H1Si1(g)
T(K)	Cp	S	-[G-H(Tr)]/T	H-H(Tr)	delta-f H	delta-f G	log Kf
0	0.	0.	INFINITE	-16.151	-491.151	-491.151	INFINITE
100	46.854	248.357	372.097	-12.374	-493.507	-484.572	253.115
200	63.216	286.041	320.258	-6.844	-495.059	-475.003	124.058
250	70.039	300.901	314.931	-3.507	-495.699	-469.914	98.183
298.15	75.455	313.717	313.717	0.	-496.222	-464.899	81.448
300	75.641	314.185	313.719	0.140	-496.241	-464.704	80.912
350	80.107	326.194	314.657	4.038	-496.680	-459.412	68.563
400	83.657	337.131	316.793	8.135	-497.025	-454.063	59.295
450	86.512	347.155	319.617	12.392	-497.286	-448.677	52.081
500	88.851	356.395	322.839	16.778	-497.478	-443.265	46.308
600	92.465	372.932	329.843	25.853	-497.691	-432.399	37.644
700	95.144	387.396	337.053	35.240	-497.729	-421.511	31.454
800	97.212	400.241	344.164	44.862	-497.642	-410.628	26.811
900	98.848	411.789	351.047	54.668	-497.466	-399.761	23.202
1000	100.164	422.275	357.654	64.621	-497.231	-388.917	20.315
1100	101.235	431.873	363.971	74.693	-496.960	-378.099	17.954
1200	102.115	440.721	370.003	84.862	-496.671	-367.306	15.988
1300	102.845	448.924	375.762	95.111	-496.381	-356.537	14.326
1400	103.455	456.569	381.264	105.427	-496.103	-345.790	12.902
1500	103.970	463.724	386.525	115.799	-495.845	-335.063	11.668
1600	104.406	470.449	391.562	126.218	-495.617	-324.352	10.589
1700	104.779	476.790	396.391	136.678	-545.602	-313.207	9.624
1800	105.100	482.788	401.026	147.172	-545.221	-299.548	8.693
1900	105.378	488.478	405.480	157.696	-544.843	-285.909	7.860
2000	105.620	493.890	409.766	168.247	-544.474	-272.291	7.112
2100	105.832	499.048	413.896	178.819	-544.116	-258.691	6.435
2200	106.018	503.976	417.879	189.412	-543.773	-245.107	5.820
2300	106.182	508.692	421.726	200.022	-543.450	-231.539	5.258
2400	106.328	513.214	425.444	210.648	-543.147	-217.984	4.744
2500	106.458	517.558	429.043	221.287	-542.870	-204.441	4.272
2600	106.575	521.735	432.528	231.939	-542.619	-190.909	3.835
2700	106.679	525.759	435.907	242.602	-542.398	-177.386	3.432
2800	106.774	529.641	439.186	253.275	-542.208	-163.871	3.057
2900	106.859	533.389	442.370	263.956	-542.050	-150.361	2.708
3000	106.936	537.013	445.464	274.646	-541.925	-136.857	2.383
3100	107.007	540.521	448.475	285.343	-541.834	-123.357	2.079
3200	107.071	543.919	451.404	296.047	-541.774	-109.859	1.793
3300	107.129	547.215	454.258	306.757	-541.746	-96.361	1.525
3400	107.183	550.414	457.039	317.473	-541.748	-82.865	1.273
3500	107.233	553.521	459.752	328.194	-541.778	-69.368	1.035
3600	107.278	556.543	462.399	338.919	-925.984	-45.409	0.659
3700	107.320	559.483	464.983	349.649	-925.647	-20.953	0.296
3800	107.359	562.345	467.508	360.383	-925.331	3.493	-0.048
3900	107.395	565.135	469.975	371.121	-925.032	27.932	-0.374
4000	107.428	567.854	472.388	381.862	-924.746	52.364	-0.684
4100	107.459	570.507	474.749	392.607	-924.468	76.788	-0.978
4200	107.488	573.097	477.060	403.354	-924.196	101.206	-1.259
4300	107.515	575.627	479.323	414.104	-923.924	125.617	-1.526
4400	107.541	578.099	481.540	424.857	-923.649	150.021	-1.781
4500	107.564	580.516	483.713	435.612	-923.367	174.420	-2.025
4600	107.586	582.880	485.843	446.370	-923.074	198.812	-2.258
4700	107.607	585.194	487.932	457.130	-922.767	223.197	-2.481
4800	107.627	587.460	489.982	467.891	-922.442	247.576	-2.694
4900	107.645	589.679	491.994	478.655	-922.097	271.948	-2.899
5000	107.662	591.854	493.970	489.420	-921.728	296.312	-3.096
5100	107.678	593.986	495.910	500.187	-921.333	320.670	-3.284
5200	107.694	596.077	497.816	510.956	-920.909	345.018	-3.466
5300	107.708	598.129	499.690	521.726	-920.455	369.359	-3.640
5400	107.722	600.142	501.531	532.497	-919.968	393.691	-3.808
5500	107.735	602.119	503.342	543.270	-919.446	418.013	-3.970
5600	107.747	604.060	505.124	554.044	-918.888	442.325	-4.126
5700	107.759	605.967	506.876	564.820	-918.293	466.627	-4.276
5800	107.770	607.841	508.601	575.596	-917.661	490.919	-4.421
5900	107.781	609.684	510.298	586.374	-916.989	515.199	-4.561
6000	107.791	611.495	511.970	597.152	-916.276	539.467	-4.696