Silicon Nitride (SiN) N1Si1(g) T(K) Cp S -[G-H(Tr)]/T H-H(Tr) delta-f H delta-f G log Kf 0 0. 0. INFINITE -8.733 371.197 371.197 INFINITE 100 29.106 184.787 243.038 -5.825 372.387 362.282 -189.237 200 29.267 204.984 219.537 -2.910 372.667 352.002 -91.934 250 29.630 211.550 217.306 -1.439 372.561 346.845 -72.469 298.15 30.168 216.812 216.812 0. 372.376 341.909 -59.901 300 30.191 216.999 216.813 0.056 372.368 341.720 -59.499 350 30.859 221.703 217.183 1.582 372.130 336.630 -50.239 400 31.551 225.868 218.013 3.142 371.874 331.576 -43.299 450 32.213 229.623 219.098 4.736 371.611 326.554 -37.905 500 32.818 233.049 220.324 6.362 371.347 321.562 -33.593 600 33.832 239.126 222.964 9.697 370.814 311.655 -27.132 700 34.616 244.403 225.658 13.121 370.269 301.838 -22.523 800 35.234 249.067 228.298 16.615 369.698 292.101 -19.072 900 35.752 253.248 230.842 20.165 369.098 282.437 -16.392 1000 36.222 257.039 233.275 23.764 368.466 272.841 -14.252 1100 36.683 260.513 235.596 27.409 367.807 263.311 -12.504 1200 37.156 263.725 237.808 31.101 367.125 253.841 -11.049 1300 37.652 266.718 239.918 34.841 366.428 244.429 -9.821 1400 38.173 269.528 241.933 38.632 365.720 235.071 -8.771 1500 38.713 272.180 243.862 42.476 365.006 225.764 -7.862 1600 39.264 274.696 245.711 46.375 364.289 216.504 -7.068 1700 39.814 277.093 247.487 50.329 313.395 207.736 -6.383 1800 40.355 279.384 249.196 54.338 312.910 201.535 -5.848 1900 40.877 281.580 250.843 58.399 312.467 195.360 -5.371 2000 41.372 283.689 252.433 62.512 312.066 189.207 -4.942 2100 41.834 285.719 253.970 66.673 311.705 183.073 -4.554 2200 42.258 287.675 255.458 70.878 311.380 176.956 -4.201 2300 42.642 289.562 256.900 75.123 311.089 170.852 -3.880 2400 42.984 291.384 258.299 79.405 310.829 164.760 -3.586 2500 43.285 293.145 259.658 83.719 310.595 158.679 -3.315 2600 43.544 294.848 260.979 88.060 310.384 152.607 -3.066 2700 43.765 296.496 262.264 92.426 310.192 146.542 -2.835 2800 43.948 298.091 263.515 96.812 310.016 140.484 -2.621 2900 44.097 299.636 264.734 101.215 309.853 134.433 -2.421 3000 44.215 301.133 265.923 105.630 309.699 128.386 -2.235 3100 44.304 302.584 267.082 110.057 309.553 122.345 -2.061 3200 44.368 303.992 268.214 114.490 309.411 116.308 -1.899 3300 44.409 305.358 269.319 118.929 309.271 110.276 -1.746 3400 44.430 306.684 270.398 123.372 309.131 104.248 -1.602 3500 44.435 307.972 271.453 127.815 308.990 98.224 -1.466 3600 44.425 309.224 272.485 132.258 -75.306 102.665 -1.490 3700 44.402 310.440 273.495 136.699 -75.040 107.605 -1.519 3800 44.370 311.624 274.483 141.138 -74.781 112.538 -1.547 3900 44.330 312.776 275.450 145.573 -74.529 117.464 -1.573 4000 44.283 313.898 276.397 150.004 -74.284 122.383 -1.598 4100 44.231 314.991 277.325 154.430 -74.047 127.297 -1.622 4200 44.176 316.056 278.235 158.850 -73.819 132.205 -1.644 4300 44.118 317.095 279.126 163.265 -73.598 137.108 -1.666 4400 44.059 318.108 280.001 167.673 -73.384 142.006 -1.686 4500 44.000 319.098 280.859 172.076 -73.178 146.898 -1.705 4600 43.941 320.064 281.700 176.473 -72.980 151.787 -1.724 4700 43.883 321.009 282.527 180.865 -72.789 156.671 -1.741 4800 43.827 321.932 283.338 185.250 -72.605 161.551 -1.758 4900 43.772 322.835 284.135 189.630 -72.428 166.428 -1.774 5000 43.721 323.719 284.918 194.005 -72.257 171.300 -1.790 5100 43.672 324.584 285.687 198.374 -72.093 176.170 -1.804 5200 43.626 325.432 286.443 202.739 -71.935 181.036 -1.819 5300 43.584 326.262 287.187 207.100 -71.783 185.900 -1.832 5400 43.544 327.077 287.918 211.456 -71.637 190.760 -1.845 5500 43.508 327.875 288.637 215.808 -71.496 195.618 -1.858 5600 43.476 328.659 289.345 220.158 -71.360 200.474 -1.870 5700 43.447 329.428 290.042 224.504 -71.230 205.327 -1.882 5800 43.422 330.184 290.727 228.847 -71.106 210.177 -1.893 5900 43.400 330.926 291.402 233.188 -70.986 215.026 -1.904 6000 43.382 331.655 292.067 237.528 -70.872 219.873 -1.914